III-Nitride Microsensors for 360° Angle Detection

The fabrication of a miniature III-nitride angle sensor is demonstrated. A monolithic device composed of a light emitter and four detectors is fabricated on a GaN-on-sapphire wafer. By integrating the device with a glass cylindrical container partially filled with ethanol as a liquid pendulum, the on-chip detectors can effectively sense the change of internally reflected light with angle rotation,...