Characterization and prevention of humidity related degradation of atomic layer deposited Al2O3Andreas Rückerl,Roland Zeisel,Martin Mandl,Ioan Costina,Thomas Schroeder, Marvin H. ZoellnerJournal of Applied Physics(2017)引用 12|浏览0暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要