Electrical Performance of Through-Silicon Vias (TSVs) for High-Frequency 3D IC Integration Applications

Jui-Feng Hung,John H. Lau, Peng-Shu Chen,Shih-Hsien Wu,Sheng-Che Hung,Shinn-Juh Lai,Ming-Lin Li,Shyh-Shyuan Sheu,Zhe-Hui Lin,Chih-Sheng Lin,Wei-Chung Lo,Ming-Jer Kao

International Symposium on Microelectronics（2012）

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摘要

In this study, the electrical performance of a general TSV structure for high-frequency 3D IC integration applications is investigated. Emphasis is placed on the proposal of an analytical model and the analytical equations of a TSV with all its key parameters. Also, the model and equations are verified, both in the frequency and time domains, by more detailed finite element analyses. Finally, a TSV electrical design guideline is proposed.

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