Fin Doping By Hot Implant for 14nm Finfet Technology and Beyond
Bingxi Sun Wood,Fareen Adeni Khaja,Benjamin P Colombeau,Shiyu Sun, Andrew Waite,Miao Jin,Hao Chen, Osbert Chan,Thirumal Thanigaivelan,Nilay Pradhan,Hans-Joachim L Gossmann,Chi-Nung Ni, Wesley Suen,Shashank Sharma, Venkataramana R Chavva, Man-Ping Cai, Motoya Okazaki,Samuel Swaroop Munnangi,Chorng-Ping Chang,Abhilash Mayur,Naushad Variam,Adam D Brand ECS Meeting Abstracts(2013)
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