N2 Plasma Treatment Effects of SiNx Buffer Layer for Low Temperature ProcessD. G. LIM, K. J. YANG,D. H. KIM,J. H. PARK,J. H. LEE, W. C. SONG,Y. S. YOO, J. YIIntegrated Ferroelectrics(2004)引用 1|浏览0暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要