Water assisted growth of two-dimensional MoS2/MoSe2 vertical heterostructures on molten glass

NANOSCALE(2022)

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摘要
Herein, we demonstrate a chemical vapor deposition route to the controlled growth of large scale MoS2/MoSe2 vertical van der Waals heterostructures on a molten glass substrate using water as the oxidizing chemical to guarantee a sufficient and uniform delivery of the metal precursor. This work offers an efficient way for developing other layered heterostructures for integrated electronic and optoelectronic devices.
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