Acousto-optic modulation in a Si-waveguide
2021 IEEE 17th International Conference on Group IV Photonics (GFP)(2021)
摘要
We demonstrate acousto-optic modulation (Vπ L ~3.6 Vcm) in a Si waveguide circuit by integrating a photonic compatible PZT film on the SOI chip. We then fabricated a small footprint inter-digital transducer (IDT) on the film to piezoelectrically actuate acoustic waves at GHz frequencies.
更多查看译文
关键词
Acoustic waveguides,Transducers,Frequency modulation,Conferences,Surface acoustic waves,Photonic integrated circuits,Waveguide theory
AI 理解论文
溯源树
样例
![](https://originalfileserver.aminer.cn/sys/aminer/pubs/mrt_preview.jpeg)
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要