Control of SiP Waveguide-Embedded Electronic Devices by Substrate/Gate Potential Tuning

Alessandro Perino,Francesco Zanetto,Matteo Petrini,Fabio Toso,Francesco Morichetti,Andrea Melloni,Giorgio Ferrari,Marco Sampietro

2021 IEEE 17th International Conference on Group IV Photonics (GFP)（2021）

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摘要

The substrate potential in Silicon Photonics chips defines the electrical properties of waveguide-integrated optoelectronic devices by counteracting the depletion of free carriers caused by oxide charges. Heater control and photoconductivity enhancement by orders of magnitude is demonstrated by means of substrate potential tuning.

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关键词

Heating systems,Electric potential,Conferences,Silicon photonics,Optoelectronic devices,Photoconductivity,Substrates

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