Analytical-Numerical Analysis for Compact Sensitivity Models of a CMOS MEMS Triaxial Convective Accelerometer

Sonia Abdellatif,Brahim Mezghani,Frédérick Mailly,Pascal Nouet

IEEE Sensors Journal（2022）

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摘要

Based on an analytical/numerical modeling approach, this paper details the derivation steps of both in-plane and out-of-plane universal sensitivity expressions of an efficient 3-axis convective accelerometer. The analytical modeling method uses finite element analysis to model the effects of key parameters on the sensitivity of the CMOS micromachined sensor. From the definition of the design space...

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关键词

Sensitivity,Accelerometers,Temperature sensors,Heating systems,Numerical models,Sensors,Finite element analysis

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