Harvesting Performance of a Planar Thermoelectric Microgenerator with a Compact Design
2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)（2021）
关键词
Thermoelectric microgenerator,MEMS,Si and SiGe nanowires,Internet of Things,energy harvesting,Si technology
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