Design, modeling and fabrication of a novel electromagnetic micro-actuator for a new concept of valveless micropump

In this paper, a novel electromagnetic microactuator prototype has been designed, analyzed and fabricated using conventional elements for a novel working principle of valveless bidirectional micropump. The proposed micro-actuator includes two unfixed permanent magnets placed in opposite polarities between two fixed coaxial coils. The novel electromagnetic actuating concept depends on moving the two unfixed permanent magnets vertically in a cylinder channel via the interaction of their magnetic fields and that resulting from both coils. Therefore, the actuation of magnets is produced with a periodic movement and controlled by the current of the coil. The finite volume method (FVM) is used to analysis the electromagnetic and mechanical behavior of the proposed micro-actuator and to give the dynamic characteristic of the actuation. The proposed micro-actuator shows a large displacement and a high electromagnetic force.