Gate Dielectric Leakage Reduction in Hard-Mask Defined and Dry-Etch Patterned Organic TFTs Devices
IEEE Electron Device Letters（2022）
Key words
Logic gates,Transistors,Organic thin film transistors,Leakage currents,Electrodes,Plastics,Temperature,Organic semiconductor,thin film transistor,sidewall effect,heating leakage,hard mask process
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