Mass-producible opto-fluidic sensors
semanticscholar(2018)
摘要
Photonics bio-microsystems developed for sensor usage comprise typically microfluidics circuitry performing sample handling and optical elements for actual sensing. The fabrication includes commonly a number of sequential steps covering microand nanostructuring of fluidic and optical features that is followed by biochemical surface functionalization. Additionally, the assembly step is required to integrate functionalities on a single platform. Here we present a methodology to upscale the fabrication of integrated opto-fluidic sensors using high-volume roll-to-roll fabrication.
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