Failure Analysis Challenges of Phase Change Memory Test Structures with Two Case Studies

J. Demarest,N. Arnold,K. Brew,V. Chan, A. Cote,T. Gordon, M. Iwatake,G. Lian, J. Li,I. OK,S. McDermott,I. Saraf,N. Saulnier,L. Tierney, A. Varghese

International Symposium for Testing and Failure Analysis ISTFA 2021 Conference Proceedings from the 47th International Symposium for Testing and Failure Analysis（2021）

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