Silver-enriched ZnO:Ag thin films deposited by magnetron co-sputtering: Post annealing effects on structural and physical properties

Materials Science and Engineering: B(2022)

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摘要
•ZnO:Ag films grown by DC Co-Sputtering Magnetron from Zn and Ag independent targets.•Detailed composition and structural analysis by RBS and XRD, respectively.•After annealing, Ag cubic phase and amorphous ZnO appear in the samples with higher Ag content.•PL results point out the Ag segregation and great defects reduction after annealing.•Plasmonic effect and an increase in conductivity are identified in annealed samples.
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关键词
ZnO:Ag compounds,DC Magnetron Sputtering,RBS and XRD analysis,Optical and Electrical characterization,Ag plasmonic effect
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