Applying the Plasma Physical Sputtering Process to SRF Cavity Treatment: Simulation and Experiment Study
APPLIED SURFACE SCIENCE（2022）
关键词
SRF cavities,Plasma processing,Self-consistent model,Sputtering-yield probability distribution,IEDF
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要