Sputtered Thin-Film Solid Oxide Fuel Cells

An all-sputter process has been developed and optimized to fabricate high-performance thin-film solid oxide fuel cells (TF-SOFCs) using conventional materials. The process involves sequential sputtering of cell components onto a porous substrate. An example structure comprises of an anode such as nickel-yttria stabilized zirconia (Ni-YSZ), an electrolyte such as YSZ, an interlayer such as gadolinium doped ceria (GDC), and then a cathode such as lanthanum strontium cobalt perovskite (LSC)-GDC. These are sputtered onto a porous substrate such as anodized aluminum oxide (AAO). Process conditions and sputtering procedures have been tailored and engineered to produce components with desired structural characteristics, i.e., a fully dense electrolyte and interlayer and a porous anode and cathode. The porous electrodes show a columnar structure with branch-like nano-fibers. Sputtered TF-SOFCs exhibit superior performance at reduced temperatures; for example, the peak power density was about 3.0 W/cm2 at 650oC (with H2 for the cell Ni-YSZ/YSZ/GDC/LSC-GDC) and the peak power density was about 2.6 W/cm2 at 700oC (with CH4 for the cell Ni-YSZ/YSZ/GDC/LSC-GDC).