Technologies for Power Device Packaging by Using Solid Liquid Interdiffusion Bonding - SLID

2021 IEEE CPMT Symposium Japan (ICSJ)(2021)

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摘要
This paper presents several approaches for bonding at low temperature with a resulting interface alloy that is stable at temperatures higher than the bonding temperature itself. The bonding principle described herewith is called Solid Liquid Interdiffusion (SLID) bonding, where two metals were used for creating an alloy. First, a low melting point metal defines the process temperature e. g. Sn, In...
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关键词
Fabrication,Liquids,Gallium,Cogeneration,Metals,Packaging,Solids
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