Sequential-Drive Switched-Capacitor Circuits For Electrostatic Loads: Modeling and Comparison

This paper explores the theory and modelling of switched-capacitor (SC) circuits that can be used to sequentially charge and discharge electrostatic loads. Such loads are typical of capacitive-dominant piezoelectric and other microelectromechanical (MEMs) actuators, but the analysis here can be extended to other applications and scenarios. A theory of sequential (pseudo-adiabatic or pseudo-soft-ch...