Magnetic Field Sensor Based on Magnetic Torque Effect and Surface Acoustic Wave With Enhanced Sensitivity

Miaomiao Cheng,Zhongqiang Hu,Jingen Wu,Chenying Wang,Yongjun Du,Dan Xian,Qi Mao,Bian Tian,Mengmeng Guan,Zhiguang Wang,Ziyao Zhou,Zhuang-De Jiang,Ming Liu

IEEE Transactions on Magnetics（2022）

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摘要

A magnetic field sensor consisting of a surface acoustic wave (SAW) generator and a cantilever beam with NdFeB permanent magnets are developed. The working principle of this magnetic sensor relies on the center frequency shift of the SAW device under the magnetic field as a consequence of the torque-effect-induced deformation of the cantilever, which changes the stress on the piezoelectric LiNbO更多

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关键词

Surface acoustic waves,Structural beams,Magnetic sensors,Magnetic fields,Magnetoacoustic effects,Magnetic resonance,Torque

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