Optimizing Emitter Diffusion Process for Atmospheric Pressure Dry Nanotextured Monocrystalline PERC

IEEE Journal of Photovoltaics(2022)

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摘要
In this article, we present an optimization of the emitter diffusion for nanotextured p-type monocrystalline silicon solar cells using atmospheric pressure dry etching (ADE) in conjunction with a post-ADE short acidic etch in a passivated emitter and rear cell (PERC) architecture. The optimization of the phosphorus oxychloride diffusion process was realized by first investigating ...
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关键词
Surface treatment,Surface texture,Computer architecture,Temperature measurement,Optimization,Microprocessors,Photovoltaic cells
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