Directly Deposited Thin-Film Strain Gauges on Curved Metallic Surfaces

Rico Ottermann, Daniel Klaas,Folke Dencker, Dominik Hoheisel, Sebastian Jung,Alexander Wienke, Jan Friedrich Düsing,Jürgen Koch,Marc Christopher Wurz

2021 IEEE Sensors（2021）

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摘要

This paper shows the possibility of direct deposition of strain gauge sensors on curved metallic surfaces of arbitrary size. A novel, patented sputtering system from the IMPT guarantees the manufacturing directly onto the surface of any component. By this, the need of the undesirable polymer foil and adhesive vanishes, which are both necessary for conventional sensors. Thin-film metal strain gauge...

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关键词

strain gauges,sputtering,direct deposition,TCR,k-factor,half-bridge,curved metallic surface,curvature

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