Real-Time Pressure Measurement Method Based on Rapid Phase Demodulation of Multi-Cavities F-P Sensor

IEEE Sensors Journal(2021)

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摘要
In this paper, a novel method for real-time pressure measurement based on rapid phase demodulation of multi-cavities Fabry-Perot (F-P) sensor is proposed. In the demodulation system, according to the principle of low-coherence interference, birefringent crystals, polarizers and analyzers are used to obtain orthogonal signals, which can significantly reduce the influence of irrelevant F-P cavities ...
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关键词
Sensors,Demodulation,Interference,Real-time systems,Pressure measurement,Micromechanical devices,Crystals
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