Low-Coherence Digital Holography For Long-Range Object Profilometer Using Double Multi-Reflection Reference Mirrors

OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION XII(2021)

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摘要
A new optical configuration of digital holography that employed two multi-reflection reference mirrors is proposed. The number of reflectance orders from the reference mirrors was doubled from the previous research of the digital holography it allows recording more interference fringes without the expansion of the camera's sensor size. The proposed double multi-reflection reference mirrors can improve the measurement range to twice better than single multireflection reference mirrors e without any degradation of without any degradation of the spatial resolution. The new system can also help to avoid the low fringe contrast of the interference pattern of the high reflection order.
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关键词
Interferometer, optical metrology, optical profilometry, low-coherence digital holography
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