High Laser Power Resistance Phase-Only Spatial Light Modulator For Laser Processing Cyber-Physical System

LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING (LAMOM) XXVI(2021)

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摘要
In this study, we developed a liquid-crystal spatial light modulator with high laser power capacity for industrial ultrafast pulse lasers to demonstrate innovative manufacturing and fabrication techniques using a cyber-physical system. The incident phase performance characteristic of this device was obtained with a 60 W, 1035 nm ultrafast laser. This research work will help to accelerate the use of liquid crystal spatial light modulators for high-precision laser processing of resistant materials and high-throughput for additive manufacturing.
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关键词
Spatial light modulator, Holographic laser processing, Ultrafast laser processing, Digital photonics, Additive manufacturing
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