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CO2 Sensing Behavior of Vertically Aligned Si Nanowire/ZnO Structures

Yusuf Selim Ocak,Meryem Lamri Zeggar,Mustafa Fatih Genisel, Nilufer Uslu Uzun,Mohammed Salah Aida

Materials Science in Semiconductor Processing（2021）

Cited 10|Views9
Key words
Silicon nanowire,Atomic layer deposition,ZnO,Gas sensing
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