Defect distribution in ZnO thin films grown on a-plane sapphire substrates by catalytic-reaction-assisted chemical vapor deposition

Journal of Crystal Growth（2021）

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摘要

•ZnO films were grown on a-plane sapphire by CVD using a catalytic reaction.•Defect distribution was determined from cross-sectional TEM images.•Defect density at film-substrate interface was 100 times higher than at film surface.

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关键词

A1 Defects,A1 TEM observation,A2 Chemical vapor deposition,B1 Oxides,B1 Zinc compound,B2 Semiconducting II-VI materials

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