Screen-Printed Resistive Pressure Sensors: Influence Of Electrode Geometry On The Performance And On Cross-Sensitivity To Strain And Temperature

30TH MICROMECHANICS AND MICROSYSTEMS EUROPE WORKSHOP (MME) 2019(2021)

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摘要
Fully screen-printed resistive pressure sensors have attracted rising attention in recent years. The possibility to fabricate them on any substrate as well as their low thickness and overall flexibility allow their application on curved surfaces or for material integrated sensing. However, these applications often apply additional loads other than only pressure to the sensors. A major concern is the cross-sensitivity of the sensors to strain. Thus, this work investigates the influence of the electrode geometry used for screen-printed pressure sensors on the device performance and on the cross-sensitivity to strain. It is shown, that the performance as well as the cross-sensitivity to strain are affected by electrode setup and orientation. The pressure sensitivity increases with the number of interdigital electrodes. The cross-sensitivity to temperature is not affected by the electrode setup.
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