Photon Management With Superlattice For Image Sensor Pixels

Yuqing Cao,Zijian Zhang, Ken Xingze Wang

AIP ADVANCES(2021)

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摘要
It is important to increase light absorption and quantum efficiency in image sensor pixels, especially for wavelength ranges in which material absorption is weak. Surface textures, including nanostructure lattices, have been invented for significant improvement in light absorption. Those nanostructures typically support a number of physical processes for which the optimal geometries are different. We design a class of nanostructure superlattices to enable the co-optimization of different physical processes for further enhancement in light absorption.
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