Growth Of 0.1(Bi,Na)Tio3-0.9batio(3) Epitaxial Films By Pulsed Laser Deposition And Their Electric Properties

0.1(Bi,Na)TiO3-0.9BaTiO(3) thin films were deposited by pulsed laser deposition as a candidate of lead-free thin films with a positive temperature coefficient of resistance for micro-thermistor applications in microelectro mechanical system devices. (001)-oriented epitaxial tetragonal films with a unity (Bi Na Ba)/Ti ratio were grown at 675 degrees C under a total pressure of 50 mTorr. The obtained films showed improved insulating properties and clear ferroelectricity. The Curie temperature was estimated to be 200 degrees C by the high-temperature X-ray diffraction measurement, which was almost the same as the reported value for the ceramic.(C) 2021 The Ceramic Society of Japan. All rights reserved.