Characterization of Heated Ion Implantation for non Amorphizing Conditions and Correlation with Kinetic Monte Carlo Simulations

Sylvain Joblot,Romain Duru,Nicolas Guitard,Vincent Lu, Thomas Nassiet,Remi Beneyton,Fuccio Cristiano,Karen Dabertrand,Julien Borrel,Marc Juhel,Edwin Arevalo,Frederic Monsieur, Celine Borowiak,Elodie Ghegin,Laurent Clement,Evan Oudot,Denis Rideau,Wei Zou,Luc Pinzelli

2018 22nd International Conference on Ion Implantation Technology (IIT)（2018）

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摘要

In this work, heated implantation impact on defect generation is observed for non-amorphizing conditions and specific anneal. Photoluminescence imaging method has been used and exhibits radiative defect density variation with chuck temperature. Moreover, to understand the behavior of such implantation in terms of defect generation and depth profile, effectiveness of Kinetic Monte Carlo (KMC) simulations is discussed.

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关键词

heated implantation,photoluminescence,defects,kinetic Monte Carlo,TCAD simulation

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