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Si Capacitive Modulator Integration in a 300mm Silicon Photonics Platform Using Different Annealing Conditions

I Charlet,L. Deniel,P. Acosta-Alba,Y. Desieres,S. Guerber,S. Kerdiles,J. Lassarre,C. Perrot,C. Euvrard-Colnat, K. Ribaud,P. Grosse,M. Gregoire, K. Rovayaz,L. Mazet,S. Cremer,N. Vulliet,S. Monfray,S. Messaoudene,D. Marris-Morini,F. Boeuf

SILICON PHOTONICS XVI（2021）

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关键词
Modulator,data centers,free carrier plasma dispersion,capacitive modulator,excimer laser annealing
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