Advanced Image Sensor Technology For Pixel Scaling Down Toward 1.0 Mu M (Invited)

IEEE INTERNATIONAL ELECTRON DEVICES MEETING 2008, TECHNICAL DIGEST(2008)

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摘要
As pixel size of image sensors shrinks down rapidly, we are reaching technical barrier to get the required low light performance. In this paper, recent advanced technologies such as backside illumination, new color filter array, low F-number with extended depth of field technologies, etc. are introduced to overcome such a barrier. It is shown that the integration of these advanced sensor technologies can make pixel size shrink down toward 10 mu m with the required performance.
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