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Integrated Fabrication of Micro/nano-Fluidic Chip Based on Nano-Imprint Lithography and Bonding

Ran Zhang,Da Huang,Yuanyi Fan,Xiao Liu,Ze Liu,Jinkui Chu

JOURNAL OF MICROMECHANICS AND MICROENGINEERING（2021）

引用 7|浏览0
关键词
nanoimprint lithography,nanochannel,enrichment
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