Metastable structures in magnetron sputtered W–Zr thin-film alloys

M. Cervena,R. Cerstvy, T. Dvorak,J. Rezek,P. Zeman

Journal of Alloys and Compounds(2021)

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摘要
•Magnetron sputtered W–Zr thin-film alloys prepared in a very wide composition range.•W-rich films with a single-phase α-W(Zr) solid solution structure up to 24 at.% Zr.•W–Zr metallic glasses with an amorphous structure between 33 and 83 at.% Zr.•Zr-rich films with a predominantly dual-phase structure at ≥86 at.% Zr.•Relationships between the structure, microstructure and properties of the films.
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关键词
W–Zr,Thin film,Metastable structure,Metallic glass,Magnetron sputtering
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