A Cmos-Compatible Oscillation-Mode Optomechanical Dc Accelerometer At 730-Ng/Hz(1/2) Resolution

Jaime Gonzalo Flor Flores,Yongjun Huang,Ying Li,Di Wang,Noam Goldberg,Jiangjun Zheng,Mingbin Yu,Ming Lu, M. Kutzer,Daniel Rogers, D. -L. Kwong, Layne Churchill,Chee Wei Wong

2016 3RD IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS（2016）

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摘要

Here we present an optomechanical accelerometer with DC resolution at 730ng/Hz(1/2) that when driven into sustained-oscillation mode, the slot photonic crystal cavity provides a radio-frequency (RF) readout of the optically-driven transduction with an enhanced sensitivity of 196 ng/Hz of RF shift. This advanced sensitivity as well as the solid-state room-temperature silicon architecture make the DC accelerometer robust for portability and field deployment.

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关键词

Optomechanics, Radio frequency photonics, Accelerometer, Photonic Crystal

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