Measuring Large Amplitude Surface Figure Error Using Coordinate Metrology
OPTICAL ENGINEERING(2021)
摘要
Advances in optical testing are as important as advances in fabrication because one can make only what one can measure. A high-precision metrology capability is utilized to close the gap between interferometric testing and lower precision metrology, laser radar, or contact-probe-based coordinate measuring machines (CMM) to accurately measure surfaces with large form error. This nearly universal optical testing method employs a precision CMM equipped with a non-contact, confocal probe. This technique was developed to characterize and align a broad spectrum of optical surfaces including ones with high slopes that are nearly impossible to measure using traditional interferometric testing without custom-made optics. Optical components covering a wide range of prescriptions, such as large convex conics, high-sloped aspherics, grazing-incidence x-ray optics, and highly deformed flats, were successfully measured. The resulting data were processed using custom-developed routines to determine the optic's alignment, the departure from design surface, and the as-built prescription parameters. This information was used to verify and guide the development and fabrication of novel optics. (C) 2021 Society of Photo-Optical Instrumentation Engineers (SPIE)
更多查看译文
关键词
optical coordinate metrology, optical shop testing, universal optical testing, large convex mirror, x-ray optics, adaptive optics, surface deformation, coordinate measuringmachine, confocal probe
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要