Multifunctional sub-100 µm thickness flexible piezo/triboelectric hybrid water energy harvester based on biocompatible AlN and soft parylene C-PDMS-Ecoflex™

Nanogenerators have emerged recently as a new technology for harvesting energy from renewable and clean energy sources. Water in nature carries high amounts of kinetic and electrostatic energy; it is ubiquitous and widely accessible in different forms: i.e. as droplets, flows or waves. Either piezoelectric or triboelectric nanogenerators (PENGs, TENGs) have been shown to be effective for harvesting energy from liquids and ocean but the integration of both transduction mechanisms in a single hybrid device allows to exploit several operating conditions and to optimize performances, overcoming the limits of single components. Current piezo-tribo hybrid devices are mostly based on scarcely durable polymers or thick lead-based ceramic materials. Additionally, they are often limited to a specific application or environment due to their architecture and employed materials. In this work, a multifunctional, flexible and conformal hybrid nanogenerator (HNG) has been developed with a sub-100 µm thickness and with a novel combination of biocompatible thin-film piezo-ceramic and soft polymeric materials, for harvesting energy of different water sources, i.e. impacts, raindrops and buoying waves. The PENG component is based on a double-sided metallized AlN thin film, sputtered on polyimide. The TENG component is made of a metallized porous patch made of a mixture of PDMS and platinum-catalyzed silicone (Ecoflex™), encapsulated by a friction film of Parylene C surface-treated with UV/ozone. As a result, the HNG exhibits non-algebraic enhanced performances: the resulting power densities under tapping are ~ 6.5 mW/m2 for PENG, 65 mW/m2 for TENG, ~ 230 mW/m2 for HNG. Multifunctionality is demonstrated by harvesting energy from different water-conveyed sources (i.e. impacts/breakwaters, raindrops, buoying waves). In particular, the device shows optimal and reliable energy harvesting performance under strong impulsive impacts (~ 0.8 W/m2) and raindrops impacts (~ 9 mW/m2). A custom buoyant device, called piezo-JellyFish (pJF), is proposed to exploit the HNGs for harvesting wave energy, based on a connection of three HNGs acting as oral arms: this system yields ~ 3.2 mW/m2, with 3 cm-amplitude standing waves. Finally, the HNG exhibits optimal adhesion on the skin and can be also used for monitoring human motions, revealing its multifunctionality also as a wearable conformal sensor.