The growth of HVPE α-Ga2O3 crystals and its solar-blind UV photodetector applications

Materials Science in Semiconductor Processing(2021)

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摘要
While Ga2O3 crystals are considered as the next generation optoelectronic materials, the exploration of HVPE α-Ga2O3 crystals and their use as solar-blind UV photodetector are still insufficient. In this paper, we investigated the structural characterization of HVPE α-Ga2O3 materials and their properties as solar-blind photodetector. HVPE α-Ga2O3 exhibited excellent structural properties with relatively good crystallinity, and smooth surface morphology, without any complicated process. Raman investigations confirmed the existence of slight compressive strain in the as-grown HVPE α-Ga2O3. UV–visible spectrophotometry proved that HVPE α-Ga2O3 had an optical bandgap of 5.15 eV, evidencing the suitability of this material for application as solar-blind photodetector. Furthermore, the photodetector synthesized using HVPE α-Ga2O3 showed excellent photo-response characteristics. We believe that this study will support further development of functional oxide semiconductor materials and opto-electronic devices.
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关键词
α-Ga2O3,Hydride vapor epitaxy,Solar-blind photodetector,Hetero-epitaxy
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