Influence of nitrogen on the synthesis of diamonds during gas-jet HWCVD deposition

I. B. Yudin, A. A. Emelyanov,M. Yu Plotnikov, A. K. Rebrov,N. Timoshenko

FULLERENES NANOTUBES AND CARBON NANOSTRUCTURES(2022)

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摘要
Gas jet deposition was used to deposit diamond on a molybdenum substrate from a mixture of hydrogen with methane and nitrogen activated on hot tungsten. Samples of diamond structures were obtained at different nitrogen flow rates. The resulting structures were studied with the methods of scanning electron microscopy and Raman spectroscopy. The analysis showed a significant effect of nitrogen addition on the structure and quality of synthesized diamond, as well as on the rate of their synthesis under the considered conditions.
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关键词
Diamond, HWCVD, nitrogen, gas-jet deposition
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