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Self-aligned Etching of Subwavelength Longwave Infrared Type-Ii Superlattice Pixels

N. A. Pfiester, S. A. Mills,J. Budhu, K-K Choi,C. D. Ball, S. M. Young,A. Grbic,D. Lubyshev,J. M. Fastenau,A. W. K. Liu,S. Krishna

Defense + Commercial Sensing（2021）

Cited 0|Views15
Key words
Type-II superlattice,reactive ion etching,longwave infrared,photodetectors
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