Synthesis And Characterization Of Structural And Optical Properties Of Single Crystalline A-Tio2 Films On Mgal2o4(111) Substrate

Anatase phase TiO2 (a-TiO2) films have been deposited on MgAl2O4(111) substrates by the metal organic chemical vapor deposition (MOCVD) method at the substrate temperatures of 500-650 degrees C. The structural analyses showed that the films were highly (004) oriented with tetragonal anatase structure and the epitaxial relationship was given as a-TiO2(004)parallel to MgAl2O4 (111). The sample prepared at 600. exhibited the best crystallization with a single-crystalline epitaxial film. The average transmittance of every TiO2 film in the visible range exceeded 90% excluding the influence of the substrate. The morphology and composition of the TiO2 films have also been studied in detail.