Modification Of Angular Photoresponse Of Ingaasn-Based Photodiode With 3d Woodpile Structures

In this paper we present modification of angular photoresponse of InGaAsN-based photodiode with applied polymer (IP-DIP) three-dimensional (3D) woodpile structure. 3D woodpile structure was prepared as effective diffractive element for using in optoelectronic devices with possibility of direct application on a chip surface. 3D woodpile structure was prepared using laser lithography by direct laser writing process. The effect of woodpile structure on angular photoresponse structure was investigated from goniophotometer measurements. Spatial modulation of light coupling into the photodiode chip with applied 3D woodpile structure was documented for irradiation by broad-band green light.