The Design Of High Voltage Inverter Power Supply For Eb Equipment

In order to acquire stable EB (electron beam) and enhance the quality of electron beam machine, the topology scircuit of AC-DC-AC-DC-AC-DC has been adopted to manufacture high voltage power source, bias voltage power source and filament power source. The inverter power supply, 150kV EB gun, vacuum system and others control system were intergrated to establish a set of EB system. Besides the high voltage and the maximal EB output, the influence of the change of bias voltage or filament current to EB output also has been measured. Through a series of tests, the result shows that not only the output of the inverter power supply has a good degree of linearity, but also the maximum beam output is up to 100mA. When the high voltage and current of filament were seted changeless, the EB will increase with the bias voltage being decreased. When the high voltage and bias voltage were set changeless, the output EB change undergoes the dead zone, increases linearly zone and constant current zone.