Nanofabricated Quantum Dot Array Formation Through Annealing Of Nano-Patterned Planar Inas

Quantum dots (QDs) are typically formed using a self-assembly process that results in random placement and size distributions, thus limiting their applicability for many devices. In this work, we report a process which uses nano-patterned planar InAs and subsequent annealing under As stabilized conditions to produce QDs with uniform placement and size distribution. The authors demonstrate the ability to form ordered QD arrays with a density of 3 x 10(10) dots/cm(2) and QD base widths of <30 nm. The authors achieved photoluminescence from the patterned area at a temperature below 100 K. [http://dx.doi.org/10.1116/1.4731471]