"On-Wafer" Surface Implanted High Power, Picosecond Pulse Ingaasp/Inp (Lambda=1.53-1.55 Mu M) Laser Diodes

OPTICAL AND QUANTUM ELECTRONICS(2000)

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摘要
A cost-effective, on-wafer surface implantation technique was applied for the fabrication of short pulse InGaAsP/InP laser diodes. Based on thick electroplated Au masks, local ion implantation could be performed, allowing a versatile design of the absorber region. Picosecond pulses with typical FWHM of 20 ps and optical power exceeding 1.8 W were obtained. The measured emission spectrum in the pulsed regime demonstrates the potential of such devices to pump commercially available EDFA's.
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on-wafer surface implantation,picosecond pulse lasers
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