Micro-Electro-Mechanical-Systems advances for measurements at small scales: the vertical silicon probes technology extended to nearfield optics

B. Walter,E. Mairiaux,S. Eliet, J-.F. Lampin,M. Faucher

PROCEEDINGS OF 2019 4TH INTERNATIONAL CONFERENCE ON MANIPULATION, AUTOMATION AND ROBOTICS AT SMALL SCALES (MARSS 2019)（2019）

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摘要

Instrumentation intending to go beyond the limits of current Atomic Force Microscope setups (AFM), and applications requiring AFM to be integrated in non-standards environmental conditions need sensors that overcome limitations given by available probes. We show that the vertical probe technology enabling AFM without laser is also applicable to scattering SNOM (Scanning Near Field Optical Microscopy).

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关键词

atomic force microscope setups,Scanning Near Field Optical Microscopy,vertical probe technology,nonstandards environmental conditions,AFM,vertical silicon probes technology,MicroElectro-Mechanical-Systems advances

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