Cmos Integrated Uv-Photodiodes
PROCEEDINGS OF THE 30TH ANNIVERSARY EUROSENSORS CONFERENCE - EUROSENSORS 2016(2016)
摘要
Highly sensitive UV-Photodiodes integrated in a versatile high voltage capable analogue 0.18 mu m CMOS technology have been developed. They provide high effective quantum efficiency (EQE 30 - 80 %) across the visible spectrum down to the vacuum UV and come on the cost of only a small modification to the core CMOS process. A single and a double junction diode as well as their dark reference devices and a special UV reference device for each are presented. (C) 2016 The Authors. Published by Elsevier Ltd.
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关键词
UV-Photodiode, Cross Talk Suppression, CMOS, Dark Reference
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