An interlaboratory study of the reproducibility of on-wafer S-parameter measurements from 140 GHz to 220 GHz
2020 94th ARFTG Microwave Measurement Symposium (ARFTG)(2020)
摘要
The development, modelling and characterization of millimeter-wave semiconductor devices calls for accurate and reproducible on-wafer measurements. We report on an interlaboratory study involving on-wafer S-parameter measurements in the 140 GHz to 220 GHz band, conducted by three well-established measurement laboratories. The measurements can be used to form typical reproducibility limits for these measurements when conducted in different laboratories using different equipment and calibration methods.
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关键词
On-wafer measurement,co-planar waveguide,measurement repeatability,measurement reproducibility,measurement uncertainty
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