Capacitive Micromachined Ultrasonic Transducers For Medical Application

In this paper, ultrasound for medical application is described briefly. Following a brief introduction to their operating principles and specifications, the research and development of capacitive micromachined ultrasonic transducer (CMUT) are reviewed. The main medical application of CMUT includes electroacoustic imaging and therapy. The fabrication technologies of CMUTs are analyzed and discussed. In addition, the design criteria of CMUT is described. At the same time, the further research of CMUT is also discussed.